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HREM

Philips XL30 FEG

High-resolution scanning electron microscope (HR-SEM) with EDX (energy dispersive X-ray spectroscopy), EDAX Genesis and Electron Backscatter Diffraction (EBSD), EDAX.

Device Specifications

Detectors Se and BSE
Resolution (SE) up to 2 nm
EDX system EDAX Genesis with liquid nitrogen cooled traditional Si(Li)-type detector, energy resolution(~136eV)
Electron Backscatter Diffraction (EBSD) system