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Materials- and Geosciences

Competence Centre for Materials Characterisation

Picture: Katrin Binner

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Sputter System

Magnetron sputtering system for oxide and (oxo)nitride materials. Sputtering can be performed in dc and rf mode. The introduction of the reactive gas allows for computer controlled gas pulses.

Sputter System
Picture: Gabi Haindl

Topics

Advanced Thin Film Technology (DS)

Related articles

  • HREM
  • ADOMBE
  • PLD
  • XRD
  • Profilometer Dektak XT Advanced System
  • Mini-PLD
  • MBE
  • Wire Bonder
  • SQUID
  • Magnet Cryostat
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Contact

Jane Gottschling

G

dekanat@matgeo.tu-...

work +49 6151 16-22242
fax +49 6151 16-22239

Work L2|01 79
Peter-Grünberg-Straße 2
64287 Darmstadt

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