Advanced System (with 3D mapping and stitching) allows measurements of small height differences via scanning of a sample below a needle with a diamant tip (stylus) as line scans.
|Vertical range||6.5 µm / 65.5 µm / 524 µm / 1 mm|
|Vertical resolution||1 Å @ 6,.5 µm vertical range|
|Scan length||55 mm (200 mm with stitching)|
|Horizontal resolution||120.000 points|
|Stage diameter||6" (15.2 cm)|
|Stylus force||1-15 mg|
|Stylus radius||2.5 µm, 5 µm, 12.5 µm, 25 µm|