Sputtercoater Quorum Q300TD

The sputter coater is used to deposit metallic thin films by Ar-sputtering of metallic targets. Sequential deposition of two different materials is possible by using two sputter heads.

Device Specifications

targets	Au, Cr (standard); noble or oxidizing metals (Pt, Al, Cu, Ag etc.)
target dimensions	54-57 mm ø
vacuum	10^-4 hPa (turbo pumping)
sample size	up to 10 cm ø
target rotation
film thickness monitor
touch screen control