Secondary ion mass spectrometer Cameca ims5f

Charged atomic and molecular species are ejected from the uppermost layers of a surface under ion bombardment. These secondary ions can be mass separated (via sector fields) and detected

Device Specifications

Primary ions Oxygen, argon or cesium
Primary energy 1-17 keV (also depending on ion source and polarities)
Lateral resolution down to ~1 µm
Detection limit down to ppb (depending on element and measurement conditions)
Sample size 1 in. (2.5 cm) diameter, 1 cm height
Measurement area up to 500x500 µm²
Detectable elements all (starting from H)
Mass resolution up to 25000