Ellipsometer Specifications:

Ellipsometer configuration: Rotating Compensator Ellipsometer (RCE)

Spectral range: U 245-1000 nm

Number of Wavelengths: U 470

Detector: CCD

Angle of incidence:

• 45°-90° (Automated Angle Base)
• 20°-90° (Vertical Automated Angle Base)
• 65° (Fixed Angle Base)
• 65° (Test Base)

Data Acquisition Rate: 0.05 seconds, minimum

(Complete Spectrum): 2-5 seconds, typical

Max substrate thickness: 18 mm

Power Requirements: 100/240 VAC, 47-63Hz, <1 Amp

Cell Specifications:

• 1) 5 mL horizontal liquid cell (RC®)
• • Measurement:
    • within a transparent liquid environment under ambient temperature conditions
  • Cell liquid capacity:
    • 5 mL
  • Incidence angle:
    • nominal 75°
  • Wetted materials:
    • cell body 303 stainless steel
  • Windows:
    • UV grade fused silica 10 mm dia x 1 mm
  • Gaskets:
    • Viton, two size-016, five size-010
  • Mounting plate:
    • 316 stainless steel
  • Spill trough:
    • PEEK thermoplastic
  • Required sample dimensions:
    • 50 mm diameter silicon wafers and 3x1 inch glass microscope slides (must exceed 51x41 mm2)
• 2) 500 µL variable temperature liquid cell
  • Measurement:
    • within a transparent liquid over the temperature range of 10-40 °C
  • Cell capacity:
    • 500 µL
  • Heat exchange fluid mixture:
    • alcohol/distilled water v/v of 25%/75%
  • Incident angle:
    • nominal 70°
  • Required sample dimensions:
    • 50 mm diameter silicon wafers and 3x1 inch glass microscope slides (must exceed 25x9.1 mm2)
• 3) Environmental cell
  • measurement:
    • under ambient pressure and temperature conditions as a function of the relative pressure p/p0 between relative pressure p of a solvent within the cell and the saturation vapor pressure p0 of the used solvent above the flat substrate
  • Incident angle:
    • nominal 70°